Spectroscopic characterization of RF hydrocarbon plasmas for DLC coatings

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dc.contributor.authorGuzmán, F.
dc.contributor.authorRuiz, M.
dc.contributor.authorValderrama, E.
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorBhuyan, Heman
dc.contributor.authorWyndham, Edmund
dc.contributor.authorChuaqui, Hernán
dc.date.accessioned2021-04-15T14:40:23Z
dc.date.available2021-04-15T14:40:23Z
dc.date.issued2014
dc.fechaingreso.objetodigital2024-03-21
dc.fuente.origenBibliotecas UC
dc.identifier.doi10.1088/1742-6596/511/1/012017
dc.identifier.issn1742-6596
dc.identifier.scopusid2-s2.0-84901594816
dc.identifier.urihttps://doi.org/10.1088/1742-6596/511/1/012017
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/57831
dc.identifier.wosidWOS:000337223400017
dc.issue.numeroNo. 1
dc.language.isoen
dc.nota.accesoContenido completo
dc.revistaJournal Of Physics: Conference Serieses_ES
dc.rightsacceso abierto
dc.titleSpectroscopic characterization of RF hydrocarbon plasmas for DLC coatings
dc.typecomunicación de congreso
dc.volumenVol. 511
sipa.codpersvinculados99732
sipa.codpersvinculados1003913
sipa.codpersvinculados100407
sipa.codpersvinculados98761
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