Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

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Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas.pdf(2.87 KB)
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2019
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https://doi.org/10.1063/1.5094603
 https://repositorio.uc.cl/handle/11534/49759
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