Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma

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Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma.pdf(3.1 KB)
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2016
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https://doi.org/10.1088/0022-3727/49/22/225203
 https://repositorio.uc.cl/handle/11534/58386
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